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MULTI-WAVELENGTH RAMAN SPECTROSCOPY
MRS-300 |
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| 1649mm (W) x 4332mm (D) x 1978mm (H) |
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Two FOUP openers included |
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Single Monitor on side |
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| The MRS-300 system design is based on a micro
Raman measurement technique and WaferMasters’
proprietary high resolution polychromator
technology. It allows multi-wavelength micro
Raman characterization of a wide range of
materials used in semiconductor manufacturing.
The polychromator, the heart of the MRS-300
system, has no moving parts to ensure high
measurement accuracy, repeatability and stability.
The Raman signals are sequentially measured by
changing excitation wavelengths without moving
the specimen under characterization. This provides
depth profiling of the Raman spectra at the same
measurement site, providing very accurate, site
specific information on the specimen. |
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| Applications |
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| Non-destructive Material Characterization and In-Line process Monitoring |
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| Lattice Strain Characterization |
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| Localized Strain Measurement |
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| Depth Profiling of Lattice Strain |
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| Crystalline Quality Measurement |
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| Material Homogeneity Measurement |
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| Ge Content Measurement in SiGe |
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| Ultra-Shallow Junction Characterization |
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| Silicide/Si Interface Characterization |
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| Dielectric/Si Interface Characterization |
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| Key Benefits & Specifications |
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| Simple and Robust Design |
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| Excitation Source: Multi-wavelength Ar+ Laser |
| - 457.9 nm |
| - 488.0 nm |
| - 514.5 nm |
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| Spectrograph |
| - Focal length: |
2m |
| - Grating: |
2400l/mm |
| - f-Number: |
14 |
| - Number of CCD Camera: |
3 |
| (4 stage TE cooled, Low Noise, High Sensitivity) |
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| Measurement Performance (Bare Si Wafer) |
| - Resolution at All λ: |
0.1cm-1 |
| - Stress Sensitivity at All λ: |
(31~46MPa) |
| - Accuracy at All λ: |
0.1cm-1 |
| - Repeatability at All λ: |
0.1cm-1 |
| - Stability at All λ: |
0.1cm-1 |
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| Objective Lens Magnification |
| - 2.5x for notch alignment |
| - 5x, 10x, 20x, 50x for measurement |
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| Optical Spatial Resolution: |
| - 4.1 μm ~ 1.0 μm (Objective Lens dependent) |
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| Measures both Bare Si or Patterened Wafers |
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| Built-in Two FOUP Openers |
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Customers are strongly encouraged to discuss current
processing problems and new applications with WaferMasters' technical staffs
at our various locations. WaferMasters is willing to assist you to find
simple and natural processing / equipment solutions. |
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