 |
| Simple and Robust Design |
|
| Vacuum Compatible
& Ambient Control |
| - low residual
O2 (<5ppm) |
| - H2
or forming gas compatible |
|
|
| Operating Temperature Range |
| - 100 ~ 450°C |
| - H2
or forming gas compatible |
|
|
| Excellent Process Uniformity:
<1% |
|
| Excellent Process Repeatability:
<3°C (range) |
|
| Competitive Throughput |
|
| Fast Installation: 0.5 day |
|
| Two Vacuum Capable loadlocks |
|
| Minimal Maintenance: every
6 to 12 months |
|
| No Consumables |
|
| Minimal Facility Requirement:
|
| - Electricity:
3phase 220VAC 30A |
| - Process
gases: up to 2 lines |
| - Cooling
water |
|
|
| Small Footprint |
|
| Energy Efficient: < 7KW
steady state, 12 KW max |
|
| Built-in Two FOUP Openers |
