DESIGN PHILOSPHY PROCESSES MEASURMENTS
   
 

WaferMasters' mission is to design and deliver innovative and cost effective processing equipment solutions for the worldwide semiconductor industry. Our innovative products set a new precedent in energy efficiency, process repeatability and product reliability. Working in harmony with the laws of physics, our application-specific design philosophy has made it possible to build wafer fabrication equipment that outperforms all others for targeted applications.

For detailed information on our products, please select a product category, then a specific product.

 
PROCESSING
SRTF Single-Wafer Rapid Thermal Furnace
SRTF - 201 LP - two process chambers with two cassette loadports for 200mm wafers.
SRTF - 330 AP - one process chamber with one FOUP loadport for 300mm wafers.
SRTF - 302 LP - two process chambers with two loadlocks and two FOUP loadports for 300mm wafers.
SAO Stacked Annealing Oven
SAO - 200 AP - five slot process module with one cassette loadport for 150mm or 200mm wafers.
SAO - 200 LP - five slot process module with one cassette loadport for 150mm or 200mm wafers.
SAO - 301 LP - five slot process module with two FOUP loadports for 300mm wafers.
SAO - 302 LP - five slot process module with two loadlocks and two FOUP loadports for 300mm wafers.
LTF Low Temperature Furnace
LTF - 300 LP - thirteen slot furnace with two FOUP loadports for 300mm wafers.
MBF Mini-Batch Furnace
MBF - 201 - one cassette processing furnace with one cassette loadport for 200mm wafers.
MBF - 300 - one cassette processing furnace with two FOUP loadports for 300mm wafers.
FAS Flash Annealing System
FAS - 200 - one process chamber with one cassette loadport for 200mm wafers.
FAS - 300 - one process chamber with two FOUP loadport for 300mm wafers.
 
MEASUREMENT
OSP Optical Surface Profilometry
OSP - 300 - one measurement stage with two FOUP loadports for 300mm wafers.
MRS Multi-Wavelength Raman Spectroscopy
MRS - 300 - one measurement stage with two FOUP loadports for 300mm wafers.