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Records 1 to 9 of 9

	Journal of Materials Research
	March 28th, 2011 -Joint paper with TSMC on B content measurement in ultra thin SiGe epitaxial layer will be available in issue 26(6) of JMR. Noncontact, in-line measurement of boron concentration from ultrathin boron-doped epitaxial Si_1–xGe_x layers on Si(100) by multiwavelength micro-Raman spectroscopy

	Electrochemical Society Meeting (219th ECS Meeting)
	May 1st~6th, 2011 Montreal, QC, Canada WaferMasters will present the following technical papers. -Joint paper with IBM Vermont on TSV Stress Characterization Stress Characterization of Tungsten-filled Through Silicon Via Arrays using Very High Resolution Multi-Wavelength Raman Spectroscopy -Joint paper with ISMI on SiGe/Si Evaluation of Very High Resolution Multi-Wavelength Raman Spectroscopy for In-Line Characterization of Patterned Epitaxial Si_1-xGe_x Layers on Si(100) Wafers -WaferMasters’ own paper on Global and Local Stress Characterization of SiN/Si Global and Local Stress Characterization of SiN/Si(100) Wafers using Optical Surface Profilometer and Multiwavelength Raman Spectroscopy

	2011 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
	May 23rd~26th, 2011 MINATEC Campus in Grenoble, France WaferMasters will present the following technical paper. -One joint paper with International Sematech Manufacturing Initiative (ISMI) High Resolution Multiwavelength m-Raman Spectroscopy for Nanoelectronic Material Characterization

	International Workshop on Junction Technology (IWJT 2011)
	June 9th~10th, 2011 Kyoto University Uji Campus, Kyoto, Japan WaferMasters will present the following paper -Joint paper with Kyoto Institute of Technology Study of Multi-wavelength-excited photoluminescence on recrystallization of ultra-shallow implanted silicon

	17th International Symposium on VLSI Technology (2011 VLSI Symposia)
	June 13th~16th, 2011 Rihga Royal Hotel, Kyoto, Japan

	Semicon West
	July 12th~14th, 2010 Moscone Center, San Francisco, CA, USA South Hall, Booth 427

	SSDM2011 (International Conference on Solid State Devices and Materials)
	September 28th~30th, 2011 Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan WaferMasters will present technical papers.

	SEMICON JAPAN
	December 1st~3rd, 2011 Makuhari Messe, Makuhari, Chiba, Japan

	2011 IEEE International Electron Devices Meeting (IEDM)
	December 2nd~9th, 2011 Hilton Washington and Towers, Washington DC WaferMasters will present technical papers.