| |
2003/09/01 -- “Advanced devices using low-temperature NiSi formation”, Solid State Technology, September 2003 edition
2001/09/20 -- "Furnace Based Single Wafer Annealing System" The Nikkei Business Daily - Technology Development Column (in Japanese)
2001/08/21 -- "Energy Efficient Thermal Processing System" The Nikkei Business Daily - Cover Story (in Japanese)
2001/03/21 -- "Can WaferMasters Revolutionize in Semiconductor Equipment Business?" Semiconductor FPD World, Vol. 4 (2001) 74. (in Japanese)
2000/12/01 -- "WaferMasters' Annealing Product & RTP Product" Electronic Journal, Vol. 11 (2000) 163. (in Japanese)
|